High-temperature epitaxial growth of tantalum nitride thin films on MgO: structural evolution and potential for SQUID applications
The growth of superconducting tantalum nitride (TaN) thin films on magnesium oxide (MgO) substrates has been studied using pulsed laser deposition (PLD). This research investigates the influence of varying deposition parameters, including substrate temperature and ambient gas composition, on the str...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2025-05-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.16.53 |
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