Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT
1 700 V trench IGBT with a design of strip-cells and dummy trench structure was developed based on the trench gate key processes in 8 inch fabrication. In dummy trench structure area, the effect of P-well interconnection types on IGBT’s static/ dynamic performance and safe operation area were studie...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Electric Drive for Locomotives
2016-01-01
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| Series: | 机车电传动 |
| Subjects: | |
| Online Access: | http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2016.03.010 |
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| _version_ | 1849323503338127360 |
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| author | LUO Haihui XIAO Qiang YU Wei YANG Xinzhu TAN Canjian HUANG Jianwei LIU Guoyou |
| author_facet | LUO Haihui XIAO Qiang YU Wei YANG Xinzhu TAN Canjian HUANG Jianwei LIU Guoyou |
| author_sort | LUO Haihui |
| collection | DOAJ |
| description | 1 700 V trench IGBT with a design of strip-cells and dummy trench structure was developed based on the trench gate key processes in 8 inch fabrication. In dummy trench structure area, the effect of P-well interconnection types on IGBT’s static/ dynamic performance and safe operation area were studied by Silvaco simulation and substrate testing. Compared with the two P-well interconnection typeed, device with floating P-well showed lower conduction and switching losses, and wider RBSOA than that with ground P-well. The intrinsic mechanism which made the difference was analyzed. The device with floating P-well, field stop structure and carrier storage layer showed a decent comprehensive performance, and had passed necessary qualification before release. |
| format | Article |
| id | doaj-art-9f13c591bfc043519371c488d52ecc69 |
| institution | Kabale University |
| issn | 1000-128X |
| language | zho |
| publishDate | 2016-01-01 |
| publisher | Editorial Department of Electric Drive for Locomotives |
| record_format | Article |
| series | 机车电传动 |
| spelling | doaj-art-9f13c591bfc043519371c488d52ecc692025-08-20T03:49:02ZzhoEditorial Department of Electric Drive for Locomotives机车电传动1000-128X2016-01-01414520918660Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBTLUO HaihuiXIAO QiangYU WeiYANG XinzhuTAN CanjianHUANG JianweiLIU Guoyou1 700 V trench IGBT with a design of strip-cells and dummy trench structure was developed based on the trench gate key processes in 8 inch fabrication. In dummy trench structure area, the effect of P-well interconnection types on IGBT’s static/ dynamic performance and safe operation area were studied by Silvaco simulation and substrate testing. Compared with the two P-well interconnection typeed, device with floating P-well showed lower conduction and switching losses, and wider RBSOA than that with ground P-well. The intrinsic mechanism which made the difference was analyzed. The device with floating P-well, field stop structure and carrier storage layer showed a decent comprehensive performance, and had passed necessary qualification before release.http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2016.03.010trench IGBTP-well in dummy trench structurehole concentrationsafe operation areaswitching-off dV/dt |
| spellingShingle | LUO Haihui XIAO Qiang YU Wei YANG Xinzhu TAN Canjian HUANG Jianwei LIU Guoyou Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT 机车电传动 trench IGBT P-well in dummy trench structure hole concentration safe operation area switching-off dV/dt |
| title | Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT |
| title_full | Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT |
| title_fullStr | Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT |
| title_full_unstemmed | Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT |
| title_short | Effect of P-well Interconnection in Dummy Trench Area on Properties of Trench IGBT |
| title_sort | effect of p well interconnection in dummy trench area on properties of trench igbt |
| topic | trench IGBT P-well in dummy trench structure hole concentration safe operation area switching-off dV/dt |
| url | http://edl.csrzic.com/thesisDetails#10.13890/j.issn.1000-128x.2016.03.010 |
| work_keys_str_mv | AT luohaihui effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT xiaoqiang effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT yuwei effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT yangxinzhu effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT tancanjian effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT huangjianwei effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt AT liuguoyou effectofpwellinterconnectionindummytrenchareaonpropertiesoftrenchigbt |