Performance study of UV micro-LEDs with AlGaN quantum dots and transparent tunnel junction

Performance study of UV micro-LEDs with AlGaN quantum dots and transparent tunnel junction

It is well known that the size of deep ultraviolet (DUV) micro LED (μLEDs) decreases, although bandwidth improves, the optical power drops sharply, severely limiting the application of DUV μLEDs in optical communication. This study focused on the fabrication of DUV μLED with 10 μm × 10 μm dimenstion...

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Bibliographic Details
Main Authors: Yun-Cheng Hsu, Ching-Ho Tien, Yun-Han Chang, Sunanda Mitra, Sankesh Shetty, Sébastien Chenot, Mohamed Al Khalfioui, Hao-Chung Kuo, Chi-Wai Chow, Chia-Yen Huang, Julien Brault, Ray-Hua Horng
Format: Article
Language:English
Published: Elsevier 2025-01-01
Series:Next Nanotechnology
Subjects:
DUV Micro-LED
Neutral particle beam etching
Optical wireless communication
Online Access:http://www.sciencedirect.com/science/article/pii/S2949829525000488
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