Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication

Piezoelectrically and Capacitively Transduced Hybrid MEMS Resonator with Superior RF Performance and Enhanced Parasitic Mitigation by Low-Temperature Batch Fabrication

This study investigates a hybrid microelectromechanical system (MEMS) acoustic resonator through a hybrid approach to combine capacitive and piezoelectric transduction mechanisms, thus harnessing the advantages of both transducer technologies within a single device. By seamlessly integrating both pi...

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Bibliographic Details
Main Authors: Adnan Zaman, Ugur Guneroglu, Abdulrahman Alsolami, Jing Wang
Format: Article
Language:English
Published: MDPI AG 2024-09-01
Series:Applied Sciences
Subjects:
lateral extensional mode
piezoelectric transducers
atomic layer deposition (ALD)
thin-film piezoelectric on substrate (TPoS) resonators
microelectromechanical system (MEMS)
quality factor
Online Access:https://www.mdpi.com/2076-3417/14/18/8166
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