A Capillary-Based Micro Gas Flow Measurement Method Utilizing Laminar Flow Regime

Accurate micro gas flow measurement is critical for medical ventilator calibration, environmental gas monitoring, and semiconductor manufacturing. Laminar flowmeters are widely employed in micro gas flow measurement applications owing to their inherent advantages of high linearity, the absence of mo...

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Bibliographic Details
Main Authors: Yuheng Zheng, Dailiang Xie, Zhengcheng Qin, Zhengwei Huang, Ya Xu, Da Wang, Hong Zheng
Format: Article
Language:English
Published: MDPI AG 2025-08-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/15/15/8593
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