Effect of electrostatic and intermolecular forces on free small vibrations of a micro-cantilever

The paper deals with free small vibrations of a micro-cantilever near the deformed static position incorporating the electrostatic and intermolecular forces acting from the fixed electrode. First, the initial static deviation of the cantilever due to the external forces is determined using the appro...

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Bibliographic Details
Main Authors: Геннадий Иванович Михасев, Вячеслав Владимирович Мисник, Марина Георгиевна Ботогова
Format: Article
Language:Belarusian
Published: Belarusian State University 2024-11-01
Series:Журнал Белорусского государственного университета: Математика, информатика
Subjects:
Online Access:https://journals.bsu.by/index.php/mathematics/article/view/6609
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