Effects of Resonator Shape on Nonlinear Resonant Frequencies of a Microresonant Pressure Sensor
A nonlinear dynamics equation for a novel microresonant pressure sensor with a cross-type resonator is proposed. The nonlinear resonant frequencies of the sensor are calculated. Effects of the system parameters and gas pressure on the nonlinear resonant frequencies are investigated. Results show tha...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2022/4161470 |
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