Effect of Annealing Treatment on the Optical Properties of Silicon Nitride Waveguides

Effect of Annealing Treatment on the Optical Properties of Silicon Nitride Waveguides

Introduction. Silicon nitride is a highly promising material for fabrication of photonic integrated circuits (PICs). Plasma-enhanced chemical vapor deposition is a prospective method for large-scale industrial production of silicon nitride-based PICs. The disadvantage of this method, which limits it...

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Main Authors: A. A. Ershov, K. N. Chekmezov, A. P. Burovikhin, A. A. Nikitin, S. N. Abolmasov, A. A. Stashkevich, E. I. Terukov, A. V. Eskov, A. A. Semenov, A. B. Ustinov
Format: Article
Language:Russian
Published: Saint Petersburg Electrotechnical University "LETI" 2024-05-01
Series:Известия высших учебных заведений России: Радиоэлектроника
Subjects:
photonic integrated circuits
optical waveguides
silicon nitride
annealing
Online Access:https://re.eltech.ru/jour/article/view/866
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