Exploring surface chemistry and electrical performance of zinc tin oxide thin films with controlling elemental composition grown by atomic layer deposition

This study investigates the effect of tin (Sn) content on the chemical, structural, and electrical properties of zinc tin oxide (ZTO) thin films. By varying the Sn content in the ZTO films grown via atomic layer deposition (ALD), we analyzed their chemical composition and structural properties using...

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Bibliographic Details
Main Authors: Dong-Hyun Lim, Ae-Rim Choi, Seung-Wook Ryu, Kyung-Won Park, Ji-Hye Choi, Il-Kwon Oh
Format: Article
Language:English
Published: Elsevier 2025-06-01
Series:Applied Surface Science Advances
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Online Access:http://www.sciencedirect.com/science/article/pii/S2666523925000832
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