MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
A mathematical model of cylindrical shaped plane-ended scanning Kelvin probe output signal is proposed considering the case of an infinite plane sample's surface with local defects represented by dot charges. Modeling results were obtained for the case of two closely situated dot charges anddif...
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Format: | Article |
Language: | English |
Published: |
Belarusian National Technical University
2015-04-01
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Series: | Приборы и методы измерений |
Subjects: | |
Online Access: | https://pimi.bntu.by/jour/article/view/111 |
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