Effect of Pressure and Temperature on Preparing PZT Films
Ferroelectrics lead zirconate titanate (PZT) thin films were fabricated by pulsed laser deposition on Pt coated Si substrate. The effect of oxygen partial pressure, substrate temperature and time of ablation on the film orientation and composition will be presented. It was found that highly (111) te...
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| Format: | Article |
| Language: | English |
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An-Najah National University
2002-01-01
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| Series: | مجلة جامعة النجاح للأبحاث العلوم الطبيعية |
| Online Access: | https://journals.najah.edu/media/journals/full_texts/effect-pressure-and-temperature-preparing-pzt-films.pdf |
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| _version_ | 1849240089499009024 |
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| author | Sharif Musameh |
| author_facet | Sharif Musameh |
| author_sort | Sharif Musameh |
| collection | DOAJ |
| description | Ferroelectrics lead zirconate titanate (PZT) thin films were fabricated by pulsed laser deposition on Pt coated Si substrate. The effect of oxygen partial pressure, substrate temperature and time of ablation on the film orientation and composition will be presented. It was found that highly (111) textured PZT films could be grown with careful selection of ablation conditions which are: the oxygen pressure is 300 mT, substrate temperature is 605 C and the ablation time is 16 minutes. |
| format | Article |
| id | doaj-art-8e167d2721244fb38f5cb854908d47bb |
| institution | Kabale University |
| issn | 1727-2114 2311-8865 |
| language | English |
| publishDate | 2002-01-01 |
| publisher | An-Najah National University |
| record_format | Article |
| series | مجلة جامعة النجاح للأبحاث العلوم الطبيعية |
| spelling | doaj-art-8e167d2721244fb38f5cb854908d47bb2025-08-20T04:00:44ZengAn-Najah National Universityمجلة جامعة النجاح للأبحاث العلوم الطبيعية1727-21142311-88652002-01-011629110110.35552/anujr.a.16.2.657Effect of Pressure and Temperature on Preparing PZT FilmsSharif Musameh0NoneFerroelectrics lead zirconate titanate (PZT) thin films were fabricated by pulsed laser deposition on Pt coated Si substrate. The effect of oxygen partial pressure, substrate temperature and time of ablation on the film orientation and composition will be presented. It was found that highly (111) textured PZT films could be grown with careful selection of ablation conditions which are: the oxygen pressure is 300 mT, substrate temperature is 605 C and the ablation time is 16 minutes.https://journals.najah.edu/media/journals/full_texts/effect-pressure-and-temperature-preparing-pzt-films.pdf |
| spellingShingle | Sharif Musameh Effect of Pressure and Temperature on Preparing PZT Films مجلة جامعة النجاح للأبحاث العلوم الطبيعية |
| title | Effect of Pressure and Temperature on Preparing PZT Films |
| title_full | Effect of Pressure and Temperature on Preparing PZT Films |
| title_fullStr | Effect of Pressure and Temperature on Preparing PZT Films |
| title_full_unstemmed | Effect of Pressure and Temperature on Preparing PZT Films |
| title_short | Effect of Pressure and Temperature on Preparing PZT Films |
| title_sort | effect of pressure and temperature on preparing pzt films |
| url | https://journals.najah.edu/media/journals/full_texts/effect-pressure-and-temperature-preparing-pzt-films.pdf |
| work_keys_str_mv | AT sharifmusameh effectofpressureandtemperatureonpreparingpztfilms |