Effect of Pressure and Temperature on Preparing PZT Films
Ferroelectrics lead zirconate titanate (PZT) thin films were fabricated by pulsed laser deposition on Pt coated Si substrate. The effect of oxygen partial pressure, substrate temperature and time of ablation on the film orientation and composition will be presented. It was found that highly (111) te...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
An-Najah National University
2002-01-01
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| Series: | مجلة جامعة النجاح للأبحاث العلوم الطبيعية |
| Online Access: | https://journals.najah.edu/media/journals/full_texts/effect-pressure-and-temperature-preparing-pzt-films.pdf |
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