Contrastive Learning with Global and Local Representation for Mixed-Type Wafer Defect Recognition

Recognizing defect patterns in semiconductor wafer bin maps (WBMs) poses a critical challenge in the integrated circuit (IC) manufacturing industry. The accurate classification and segmentation of these defect patterns are of utmost significance as they are key to tracing the root causes of defects,...

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Bibliographic Details
Main Authors: Shantong Yin, Yangkun Zhang, Rui Wang
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/25/4/1272
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