Residual stress and deformation analysis considering adhesive material properties to enhance manufacturing of HBM

Residual stress and deformation in dies and wafers pose significant challenges in high-bandwidth memory (HBM) manufacturing. Precise die alignment is critical for multi-stacked dies in HBM packages, which utilize ultra-fine pitch interconnections. The adhesive used in the HBM process plays a crucial...

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Bibliographic Details
Main Authors: Jaejin Jeon, Jeonghoon Song, Jun Young Oh, Seok Hwan Lee, Younghun Kim, Yun Ho Kim, Sam-Jong Choi, Sang Won Yoon
Format: Article
Language:English
Published: Elsevier 2025-09-01
Series:Journal of Materials Research and Technology
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2238785425020125
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