Influence of Substrate Bias Voltage on Structure and Properties of (AlCrMoNiTi)N Films

Influence of Substrate Bias Voltage on Structure and Properties of (AlCrMoNiTi)N Films

(AlCrMoNiTi)N high-entropy alloy nitride (HEAN) films were synthesized at various bias voltages using the co-filter cathodic vacuum arc (co-FCVA) deposition technique. This study systematically investigates the effect of bias voltage on the microstructure and performance of HEAN films. The results i...

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Bibliographic Details
Main Authors: Xue Gao, Bin Li, Yiman Zhao, Xunwang Shi, Yujie Chen, Bin Liao, Erzhou Ren
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Nanomaterials
Subjects:
(AlCrMoNiTi)N HEAN films
nanocomposite structure
co-FCVA
bias voltage
performance
Online Access:https://www.mdpi.com/2079-4991/14/24/2002
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