Nanoantennas and metasurfaces tailored by electron beam lithography and substrate conductivity
Abstract The precision and reproducibility in the fabrication of periodic nanoantenna arrays are crucial for metasurfaces to achieve consistent and controllable optical responses, and electron beam lithography (EBL) enables this by providing patterning with high resolution down to the nanoscale. Thi...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-08-01
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| Series: | Scientific Reports |
| Subjects: | |
| Online Access: | https://doi.org/10.1038/s41598-025-12996-3 |
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