Model of simulation of the process of formation of functional surfaces of micro-opto-electro-mechanical systems’ components
The subject of the article is to establish the relationships between the parameters of formation the functional surfaces of the substrates of micro-opto-electro-mechanical systems’ (MOEMS) components and their physical and technological parameters. Objectives: to increase the reliability and reprodu...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Ivan Kozhedub Kharkiv National Air Force University
2020-06-01
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| Series: | Системи озброєння і військова техніка |
| Subjects: | |
| Online Access: | https://journal-hnups.com.ua/index.php/soivt/article/view/335 |
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