Size-dependent behavior of a MEMS microbeam under electrostatic actuation
The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are der...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Publishing House for Science and Technology
2022-03-01
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| Series: | Vietnam Journal of Mechanics |
| Subjects: | |
| Online Access: | https://vjs.ac.vn/index.php/vjmech/article/view/16834 |
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| Summary: | The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are derived from Hamilton’s principle, and they are transferred to a discretized form using a two-node beam element. Newton-Raphson based iterative procedure is used in conjunction with Newmark method to obtain the pull-in voltages and deflections of a clamped-clamped microbeam under electrostatic actuation. The influence of the axial force, applied voltage and material length scale parameter on the behavior of the beam is studied in detail and highlighted.
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| ISSN: | 0866-7136 2815-5882 |