Size-dependent behavior of a MEMS microbeam under electrostatic actuation
The size-dependent behavior of a silicon microbeam with an axial force in MEMS is studied using a nonlinear finite element procedure. Based on a refined third-order shear deformation theory and the modified couple stress theory (MCST), nonlinear differential equations of motion for the beam are der...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Publishing House for Science and Technology
2022-03-01
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| Series: | Vietnam Journal of Mechanics |
| Subjects: | |
| Online Access: | https://vjs.ac.vn/index.php/vjmech/article/view/16834 |
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