Multilayer Nitride Coatings (TiZrNbHf)N/MoN
It is shown that at low negative bias potential applied to the substrate during the deposition (Ub lesser than 150 V), a two-phase state with the preferred orientation of crystallites can be reached for the multilayer coatings with the thickness of layers of 50 nm. This causes high hardness (up to 5...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2016-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2016/3/articles/Proof_jnep_2016_V8_03045.pdf |
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| Summary: | It is shown that at low negative bias potential applied to the substrate during the deposition (Ub lesser than 150 V), a two-phase state with the preferred orientation of crystallites can be reached for the multilayer coatings with the thickness of layers of 50 nm. This causes high hardness (up to 59 GPa) and high adhesion strength at the same time (critical load reaches 124.9 N). Low wear resistance of the coatings in contact with the counterbody of Al2O3 is observed. |
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| ISSN: | 2077-6772 |