Multilayer Nitride Coatings (TiZrNbHf)N/MoN
It is shown that at low negative bias potential applied to the substrate during the deposition (Ub lesser than 150 V), a two-phase state with the preferred orientation of crystallites can be reached for the multilayer coatings with the thickness of layers of 50 nm. This causes high hardness (up to 5...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2016-10-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2016/3/articles/Proof_jnep_2016_V8_03045.pdf |
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