Electrical Performance of ZTO Thin-Film Transistors and Inverters

In this study, zinc–tin oxide (ZTO) thin films were prepared via radio-frequency magnetron sputtering to examine the influence of annealing temperature on the performance of thin-film transistors (TFTs) and their resistive-load inverters. The findings reveal that annealing modulates the concentratio...

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Bibliographic Details
Main Authors: Jieyang Wang, Liang Guo, Xuefeng Chu, Fan Yang, Hansong Gao, Chao Wang, Yaodan Chi, Xiaotian Yang
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Micromachines
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Online Access:https://www.mdpi.com/2072-666X/16/7/751
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