Design and Testing of MEMS Component for Electromagnetic Pulse Protection

Design and Testing of MEMS Component for Electromagnetic Pulse Protection

With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electro...

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Bibliographic Details
Main Authors:	Shiyi Li, Hengzhen Feng, Wenzhong Lou, Yuecen Zhao, Sining Lv, Wenxing Kan
Format:	Article
Language:	English
Published:	MDPI AG 2025-01-01
Series:	Sensors
Subjects:	strong electromagnetic environment electromagnetic energy diversion response characterization safety protection MEMS
Online Access:	https://www.mdpi.com/1424-8220/25/1/221
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