Design and Testing of MEMS Component for Electromagnetic Pulse Protection
With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electro...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/25/1/221 |
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| author | Shiyi Li Hengzhen Feng Wenzhong Lou Yuecen Zhao Sining Lv Wenxing Kan |
| author_facet | Shiyi Li Hengzhen Feng Wenzhong Lou Yuecen Zhao Sining Lv Wenxing Kan |
| author_sort | Shiyi Li |
| collection | DOAJ |
| description | With the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms. |
| format | Article |
| id | doaj-art-81bca016674f4867a9070e03dfd38360 |
| institution | Kabale University |
| issn | 1424-8220 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj-art-81bca016674f4867a9070e03dfd383602025-01-10T13:21:16ZengMDPI AGSensors1424-82202025-01-0125122110.3390/s25010221Design and Testing of MEMS Component for Electromagnetic Pulse ProtectionShiyi Li0Hengzhen Feng1Wenzhong Lou2Yuecen Zhao3Sining Lv4Wenxing Kan5School of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaDepartment of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaSchool of Mechatronical Engineering, Beijing Institute of Technology, Beijing 100081, ChinaWith the demand for high-safety, high-integration, and lightweight micro- and nano-electronic components, an MEMS electromagnetic energy-releasing component was innovatively designed based on the corona discharge theory. The device subverted the traditional device-level protection method for electromagnetic energy, realizing the innovation of adding a complex circuit system to the integrated chip through micro-nanometer processing technology and enhancing the chip’s size from the centimeter level to the micron level. In this paper, the working performance of the MEMS electromagnetic energy-releasing component was verified through a combination of a simulation, a static experiment, and a dynamic test, and a characterization test of the tested MEMS electromagnetic energy-releasing component was carried out to thoroughly analyze the effect of the MEMS electromagnetic energy-releasing component. The results showed that after the strong electromagnetic pulse injection, the pulse breakdown voltage of the MEMS electromagnetic energy-releasing component increased exponentially in terms of the pulse injection voltage, and the residual pulse current decreased significantly from one-third to one-half of the original, representing a significant protective effect. In a DC environment, the breakdown voltage of the needle–needle structure of the MEMS electromagnetic energy-releasing component was 144 V, and the on-time was about 0.5 ms.https://www.mdpi.com/1424-8220/25/1/221strong electromagnetic environmentelectromagnetic energy diversionresponse characterizationsafety protectionMEMS |
| spellingShingle | Shiyi Li Hengzhen Feng Wenzhong Lou Yuecen Zhao Sining Lv Wenxing Kan Design and Testing of MEMS Component for Electromagnetic Pulse Protection Sensors strong electromagnetic environment electromagnetic energy diversion response characterization safety protection MEMS |
| title | Design and Testing of MEMS Component for Electromagnetic Pulse Protection |
| title_full | Design and Testing of MEMS Component for Electromagnetic Pulse Protection |
| title_fullStr | Design and Testing of MEMS Component for Electromagnetic Pulse Protection |
| title_full_unstemmed | Design and Testing of MEMS Component for Electromagnetic Pulse Protection |
| title_short | Design and Testing of MEMS Component for Electromagnetic Pulse Protection |
| title_sort | design and testing of mems component for electromagnetic pulse protection |
| topic | strong electromagnetic environment electromagnetic energy diversion response characterization safety protection MEMS |
| url | https://www.mdpi.com/1424-8220/25/1/221 |
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