Infinitesimal optical singularity ruler for three-dimensional picometric metrology

Abstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement pre...

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Main Authors: Haixiang Ma, Yuquan Zhang, Jiakang Zhou, Fu Feng, Michael G. Somekh, Changjun Min, Xiaocong Yuan
Format: Article
Language:English
Published: Nature Portfolio 2024-12-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-55210-0
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_version_ 1841559293070934016
author Haixiang Ma
Yuquan Zhang
Jiakang Zhou
Fu Feng
Michael G. Somekh
Changjun Min
Xiaocong Yuan
author_facet Haixiang Ma
Yuquan Zhang
Jiakang Zhou
Fu Feng
Michael G. Somekh
Changjun Min
Xiaocong Yuan
author_sort Haixiang Ma
collection DOAJ
description Abstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of ~4.5 pm (~λ/140000) in the transverse direction and ~24.2 pm (~λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm.
format Article
id doaj-art-7db9bcf8341b4211896f2c3abe6e9950
institution Kabale University
issn 2041-1723
language English
publishDate 2024-12-01
publisher Nature Portfolio
record_format Article
series Nature Communications
spelling doaj-art-7db9bcf8341b4211896f2c3abe6e99502025-01-05T12:36:41ZengNature PortfolioNature Communications2041-17232024-12-011511610.1038/s41467-024-55210-0Infinitesimal optical singularity ruler for three-dimensional picometric metrologyHaixiang Ma0Yuquan Zhang1Jiakang Zhou2Fu Feng3Michael G. Somekh4Changjun Min5Xiaocong Yuan6Nanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityResearch Center for Frontier Fundamental Studies, Zhejiang LabResearch Center for Frontier Fundamental Studies, Zhejiang LabNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityAbstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of ~4.5 pm (~λ/140000) in the transverse direction and ~24.2 pm (~λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm.https://doi.org/10.1038/s41467-024-55210-0
spellingShingle Haixiang Ma
Yuquan Zhang
Jiakang Zhou
Fu Feng
Michael G. Somekh
Changjun Min
Xiaocong Yuan
Infinitesimal optical singularity ruler for three-dimensional picometric metrology
Nature Communications
title Infinitesimal optical singularity ruler for three-dimensional picometric metrology
title_full Infinitesimal optical singularity ruler for three-dimensional picometric metrology
title_fullStr Infinitesimal optical singularity ruler for three-dimensional picometric metrology
title_full_unstemmed Infinitesimal optical singularity ruler for three-dimensional picometric metrology
title_short Infinitesimal optical singularity ruler for three-dimensional picometric metrology
title_sort infinitesimal optical singularity ruler for three dimensional picometric metrology
url https://doi.org/10.1038/s41467-024-55210-0
work_keys_str_mv AT haixiangma infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT yuquanzhang infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT jiakangzhou infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT fufeng infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT michaelgsomekh infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT changjunmin infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology
AT xiaocongyuan infinitesimalopticalsingularityrulerforthreedimensionalpicometricmetrology