Infinitesimal optical singularity ruler for three-dimensional picometric metrology
Abstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement pre...
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Nature Portfolio
2024-12-01
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Series: | Nature Communications |
Online Access: | https://doi.org/10.1038/s41467-024-55210-0 |
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author | Haixiang Ma Yuquan Zhang Jiakang Zhou Fu Feng Michael G. Somekh Changjun Min Xiaocong Yuan |
author_facet | Haixiang Ma Yuquan Zhang Jiakang Zhou Fu Feng Michael G. Somekh Changjun Min Xiaocong Yuan |
author_sort | Haixiang Ma |
collection | DOAJ |
description | Abstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of ~4.5 pm (~λ/140000) in the transverse direction and ~24.2 pm (~λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm. |
format | Article |
id | doaj-art-7db9bcf8341b4211896f2c3abe6e9950 |
institution | Kabale University |
issn | 2041-1723 |
language | English |
publishDate | 2024-12-01 |
publisher | Nature Portfolio |
record_format | Article |
series | Nature Communications |
spelling | doaj-art-7db9bcf8341b4211896f2c3abe6e99502025-01-05T12:36:41ZengNature PortfolioNature Communications2041-17232024-12-011511610.1038/s41467-024-55210-0Infinitesimal optical singularity ruler for three-dimensional picometric metrologyHaixiang Ma0Yuquan Zhang1Jiakang Zhou2Fu Feng3Michael G. Somekh4Changjun Min5Xiaocong Yuan6Nanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityResearch Center for Frontier Fundamental Studies, Zhejiang LabResearch Center for Frontier Fundamental Studies, Zhejiang LabNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityNanophotonics Research Center, Institute of Microscale Optoelectronics, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityAbstract Optical metrology with picometer-scale precision in three-dimensional space is of considerable importance in modern physics and state of the art technology, optical interference is an effective method, but techniques with rapid spatial variation have the potential to enhance measurement precision, which will be required as measurement dimensions decrease. Here, the concept of the vanishingly small optical phase singularity ruler is introduced. Inspired by the well-known plumb-line technique used to locate the centroid, an analogous singularity line technique is proposed to locate the optical singularity with a precision of ~4.5 pm (~λ/140000) in the transverse direction and ~24.2 pm (~λ/26000) in the longitudinal direction. This precisely positioned singularity can serve as a ruler to detect displacement signals with an accuracy approaching ~60 pm.https://doi.org/10.1038/s41467-024-55210-0 |
spellingShingle | Haixiang Ma Yuquan Zhang Jiakang Zhou Fu Feng Michael G. Somekh Changjun Min Xiaocong Yuan Infinitesimal optical singularity ruler for three-dimensional picometric metrology Nature Communications |
title | Infinitesimal optical singularity ruler for three-dimensional picometric metrology |
title_full | Infinitesimal optical singularity ruler for three-dimensional picometric metrology |
title_fullStr | Infinitesimal optical singularity ruler for three-dimensional picometric metrology |
title_full_unstemmed | Infinitesimal optical singularity ruler for three-dimensional picometric metrology |
title_short | Infinitesimal optical singularity ruler for three-dimensional picometric metrology |
title_sort | infinitesimal optical singularity ruler for three dimensional picometric metrology |
url | https://doi.org/10.1038/s41467-024-55210-0 |
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