Design and Fabrication of Multi-Frequency and Low-Quality-Factor Capacitive Micromachined Ultrasonic Transducers

Design and Fabrication of Multi-Frequency and Low-Quality-Factor Capacitive Micromachined Ultrasonic Transducers

Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for air-coupled applications to address key challenges such as noise, prolonged ringing, and side-lobe interference. This study introduces an optimized CMUT design that leverages the squeeze-film damping effect to achieve a...

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Bibliographic Details
Main Authors: Amirhossein Moshrefi, Abid Ali, Mathieu Gratuze, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2025-07-01
Series:Micromachines
Subjects:
ultrasonic sensor
quality factor optimization
array design
CMUT
MEMS
Online Access:https://www.mdpi.com/2072-666X/16/7/797
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