Design and Fabrication of Multi-Frequency and Low-Quality-Factor Capacitive Micromachined Ultrasonic Transducers
Capacitive micromachined ultrasonic transducers (CMUTs) have been developed for air-coupled applications to address key challenges such as noise, prolonged ringing, and side-lobe interference. This study introduces an optimized CMUT design that leverages the squeeze-film damping effect to achieve a...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-07-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/7/797 |
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