Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports
Deviation of the actual system from the ideal supporting conditions caused by micromachining errors and manufacturing defects or the requirement of innovative design and optimization of microelectromechanical systems (MEMS) make the nonideal boundary in the micro-/nanoresonator system receive wide a...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2020-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2020/4507280 |
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| _version_ | 1849408635766046720 |
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| author | Yunxia Chang Qichang Zhang Wei Wang Jianxin Han |
| author_facet | Yunxia Chang Qichang Zhang Wei Wang Jianxin Han |
| author_sort | Yunxia Chang |
| collection | DOAJ |
| description | Deviation of the actual system from the ideal supporting conditions caused by micromachining errors and manufacturing defects or the requirement of innovative design and optimization of microelectromechanical systems (MEMS) make the nonideal boundary in the micro-/nanoresonator system receive wide attention. In this paper, we consider the neutral plane tension, fringing field, and nonideal boundary factors to establish a continuum model of electrostatically driven microbeam resonators. The convergent static solution with nine-order Galerkin decomposition is calculated. Then, based on the static solution, a 1-DOF dynamic equation of up to the fifth-order of the dynamic displacement using a Taylor expansion is derived. The method of multiple scales is used to study the effect of spring stiffness coefficients on the primary frequency response characteristics and hardening-softening conversion phenomena in four cases. The various law of the system’s static and dynamic performances with the spring stiffness coefficients is obtained. The conditions for judging the hardening-softening transition are derived. So, adjusting the support stiffness values can be a measure of optimizing the resonator performance. |
| format | Article |
| id | doaj-art-7c674eeeaf5349d19e2514aa94f6f5a0 |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2020-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-7c674eeeaf5349d19e2514aa94f6f5a02025-08-20T03:35:44ZengWileyShock and Vibration1070-96221875-92032020-01-01202010.1155/2020/45072804507280Mechanical Behaviors of Electrostatic Microbeams with Nonideal SupportsYunxia Chang0Qichang Zhang1Wei Wang2Jianxin Han3Tianjin Key Laboratory of Nonlinear Dynamics and Control, School of Mechanical Engineering, Tianjin University, Tianjin 300350, ChinaTianjin Key Laboratory of Nonlinear Dynamics and Control, School of Mechanical Engineering, Tianjin University, Tianjin 300350, ChinaTianjin Key Laboratory of Nonlinear Dynamics and Control, School of Mechanical Engineering, Tianjin University, Tianjin 300350, ChinaTianjin Key Laboratory of High Speed Cutting and Precision Machining, School of Mechanical Engineering, Tianjin University of Technology and Education, Tianjin 300222, ChinaDeviation of the actual system from the ideal supporting conditions caused by micromachining errors and manufacturing defects or the requirement of innovative design and optimization of microelectromechanical systems (MEMS) make the nonideal boundary in the micro-/nanoresonator system receive wide attention. In this paper, we consider the neutral plane tension, fringing field, and nonideal boundary factors to establish a continuum model of electrostatically driven microbeam resonators. The convergent static solution with nine-order Galerkin decomposition is calculated. Then, based on the static solution, a 1-DOF dynamic equation of up to the fifth-order of the dynamic displacement using a Taylor expansion is derived. The method of multiple scales is used to study the effect of spring stiffness coefficients on the primary frequency response characteristics and hardening-softening conversion phenomena in four cases. The various law of the system’s static and dynamic performances with the spring stiffness coefficients is obtained. The conditions for judging the hardening-softening transition are derived. So, adjusting the support stiffness values can be a measure of optimizing the resonator performance.http://dx.doi.org/10.1155/2020/4507280 |
| spellingShingle | Yunxia Chang Qichang Zhang Wei Wang Jianxin Han Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports Shock and Vibration |
| title | Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports |
| title_full | Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports |
| title_fullStr | Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports |
| title_full_unstemmed | Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports |
| title_short | Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports |
| title_sort | mechanical behaviors of electrostatic microbeams with nonideal supports |
| url | http://dx.doi.org/10.1155/2020/4507280 |
| work_keys_str_mv | AT yunxiachang mechanicalbehaviorsofelectrostaticmicrobeamswithnonidealsupports AT qichangzhang mechanicalbehaviorsofelectrostaticmicrobeamswithnonidealsupports AT weiwang mechanicalbehaviorsofelectrostaticmicrobeamswithnonidealsupports AT jianxinhan mechanicalbehaviorsofelectrostaticmicrobeamswithnonidealsupports |