Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports
Deviation of the actual system from the ideal supporting conditions caused by micromachining errors and manufacturing defects or the requirement of innovative design and optimization of microelectromechanical systems (MEMS) make the nonideal boundary in the micro-/nanoresonator system receive wide a...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2020-01-01
|
| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2020/4507280 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|