Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes

This paper investigates the short-circuit characteristics of 1.2 kV symmetrical and asymmetrical trench-gate SiC MOSFETs. Based on the self-designed short-circuit test platform, single and repetitive short-circuit tests were carried out to characterize the short-circuit capability of the devices und...

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Main Authors: Li Liu, Bo Pang, Siqiao Li, Yulu Zhen, Gangpeng Li
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/16/7/768
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author Li Liu
Bo Pang
Siqiao Li
Yulu Zhen
Gangpeng Li
author_facet Li Liu
Bo Pang
Siqiao Li
Yulu Zhen
Gangpeng Li
author_sort Li Liu
collection DOAJ
description This paper investigates the short-circuit characteristics of 1.2 kV symmetrical and asymmetrical trench-gate SiC MOSFETs. Based on the self-designed short-circuit test platform, single and repetitive short-circuit tests were carried out to characterize the short-circuit capability of the devices under different electrical stresses through the short-circuit withstanding time (SCWT). Notably, the asymmetric trench structure exhibited a superior short-circuit capability under identical test conditions, achieving a longer SCWT compared to its symmetrical counterpart. Moreover, TCAD was used to model the two devices and fit the short-circuit current waveforms to study the difference in short-circuit characteristics under different conditions. For the degradation of the devices after repetitive short-circuit stresses, repetitive short-circuit pulse experiments were conducted for the two groove structures separately. The asymmetric trench devices show a positive Vth drift, increasing on-resistance, increasing C<sub>gs</sub> and C<sub>ds</sub>, and decreasing C<sub>gd</sub>, while the symmetric trench devices show a negative Vth drift, decreasing on-resistance, and inverse variation in capacitance parameters. Both blocking voltages are degraded, but the gate-source leakage current remains low, indicating that the gate oxide has not yet been damaged.
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issn 2072-666X
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publishDate 2025-06-01
publisher MDPI AG
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spelling doaj-art-7c4ca4d311c84bbbb9832a75416820b22025-08-20T03:08:10ZengMDPI AGMicromachines2072-666X2025-06-0116776810.3390/mi16070768Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse StrikesLi Liu0Bo Pang1Siqiao Li2Yulu Zhen3Gangpeng Li4State Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi’an 710071, ChinaGuangzhou Institute of Technology, Xidian University, Guangzhou 510555, ChinaGuangzhou Institute of Technology, Xidian University, Guangzhou 510555, ChinaGuangzhou Institute of Technology, Xidian University, Guangzhou 510555, ChinaState Key Laboratory of Wide-Bandgap Semiconductor Devices and Integrated Technology, School of Microelectronics, Xidian University, Xi’an 710071, ChinaThis paper investigates the short-circuit characteristics of 1.2 kV symmetrical and asymmetrical trench-gate SiC MOSFETs. Based on the self-designed short-circuit test platform, single and repetitive short-circuit tests were carried out to characterize the short-circuit capability of the devices under different electrical stresses through the short-circuit withstanding time (SCWT). Notably, the asymmetric trench structure exhibited a superior short-circuit capability under identical test conditions, achieving a longer SCWT compared to its symmetrical counterpart. Moreover, TCAD was used to model the two devices and fit the short-circuit current waveforms to study the difference in short-circuit characteristics under different conditions. For the degradation of the devices after repetitive short-circuit stresses, repetitive short-circuit pulse experiments were conducted for the two groove structures separately. The asymmetric trench devices show a positive Vth drift, increasing on-resistance, increasing C<sub>gs</sub> and C<sub>ds</sub>, and decreasing C<sub>gd</sub>, while the symmetric trench devices show a negative Vth drift, decreasing on-resistance, and inverse variation in capacitance parameters. Both blocking voltages are degraded, but the gate-source leakage current remains low, indicating that the gate oxide has not yet been damaged.https://www.mdpi.com/2072-666X/16/7/768SiC MOSFETstrench gateshort circuitdegradation
spellingShingle Li Liu
Bo Pang
Siqiao Li
Yulu Zhen
Gangpeng Li
Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
Micromachines
SiC MOSFETs
trench gate
short circuit
degradation
title Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
title_full Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
title_fullStr Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
title_full_unstemmed Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
title_short Research on the Short-Circuit Characteristics of Trench-Type SiC Power MOSFETs Under Single and Repetitive Pulse Strikes
title_sort research on the short circuit characteristics of trench type sic power mosfets under single and repetitive pulse strikes
topic SiC MOSFETs
trench gate
short circuit
degradation
url https://www.mdpi.com/2072-666X/16/7/768
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AT bopang researchontheshortcircuitcharacteristicsoftrenchtypesicpowermosfetsundersingleandrepetitivepulsestrikes
AT siqiaoli researchontheshortcircuitcharacteristicsoftrenchtypesicpowermosfetsundersingleandrepetitivepulsestrikes
AT yuluzhen researchontheshortcircuitcharacteristicsoftrenchtypesicpowermosfetsundersingleandrepetitivepulsestrikes
AT gangpengli researchontheshortcircuitcharacteristicsoftrenchtypesicpowermosfetsundersingleandrepetitivepulsestrikes