Controlling the wavefront aberration of a large-aperture and high-precision holographic diffraction grating

Abstract The scanning interference field exposure technique is an effective method to fabricate holographic diffraction grating with meter-level size and nano-level precision. The main problems of fabricating large-aperture and high-precision grating by this technique are the high-precision displace...

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Bibliographic Details
Main Authors: Wenhao Li, Xinyu Wang, Bayanheshig, Zhaowu Liu, Wei Wang, Shan Jiang, Yubo Li, Shuo Li, Wei Zhang, Yanxiu Jiang, Zheng Wu, Wenyuan Zhou
Format: Article
Language:English
Published: Nature Publishing Group 2025-03-01
Series:Light: Science & Applications
Online Access:https://doi.org/10.1038/s41377-025-01785-2
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