A universal high-resolution micro-patterning technique for solution-processed materials

A universal method of micro-patterning thin quantum dot films is highly desired by industry to enable the integration of quantum dot materials with optoelectronic devices. Many of the methods reported so far, including specially engineered photoresist or ink-jet printing, are either of poor yield, r...

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Main Authors: John Leo Velpugonda, Naresh Varnakavi, Matthew Yerich, Lih Y Lin
Format: Article
Language:English
Published: Light Publishing Group 2025-08-01
Series:Light: Advanced Manufacturing
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Online Access:https://www.light-am.com/article/doi/10.37188/lam.2025.015
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_version_ 1849240160315637760
author John Leo Velpugonda
Naresh Varnakavi
Matthew Yerich
Lih Y Lin
author_facet John Leo Velpugonda
Naresh Varnakavi
Matthew Yerich
Lih Y Lin
author_sort John Leo Velpugonda
collection DOAJ
description A universal method of micro-patterning thin quantum dot films is highly desired by industry to enable the integration of quantum dot materials with optoelectronic devices. Many of the methods reported so far, including specially engineered photoresist or ink-jet printing, are either of poor yield, resolution limited, difficult to scale for mass production, overly expensive, or sacrificing some optical quality of the quantum dots. In our previous work, we presented a dry photolithographic lift-off method for pixelization of solution-processed materials and demonstrated its application in patterning perovskite quantum dot pixels, 10 µm in diameter, to construct a static micro-display. This report presents further development of this method and demonstrates high-resolution patterning (~1 µm diameter), full-scale processing on a 100 mm wafer, and multi-color integration of two different varieties of quantum dots. Perovskite and cadmium-selenide quantum dots were adopted for the experimentation, but the method can be applied to other types of solution-processed materials. We also demonstrate the viability of this method for constructing high-resolution micro-arrays of quantum dot color-convertors by fabricating patterned films directly on top of a blue gallium-nitride LED substrate. The green perovskite quantum dots used for fabrication were synthesized via the room-temperature ligand-assisted reprecipitation method developed by our research group, yielding a photoluminescent quantum yield of 93.6% and full-width half-maximum emission linewidth less than 20 nm. Our results demonstrate the viability of this method for use in scalable manufacturing of high-resolution micro-displays paving the way for improved optoelectronic applications.
format Article
id doaj-art-7acf116090a24135be3cd6a8b579d655
institution Kabale University
issn 2689-9620
language English
publishDate 2025-08-01
publisher Light Publishing Group
record_format Article
series Light: Advanced Manufacturing
spelling doaj-art-7acf116090a24135be3cd6a8b579d6552025-08-20T04:00:43ZengLight Publishing GroupLight: Advanced Manufacturing2689-96202025-08-016222823510.37188/lam.2025.015A universal high-resolution micro-patterning technique for solution-processed materialsJohn Leo Velpugondahttps://orcid.org/0000-0003-2481-5645Naresh VarnakaviMatthew YerichLih Y LinA universal method of micro-patterning thin quantum dot films is highly desired by industry to enable the integration of quantum dot materials with optoelectronic devices. Many of the methods reported so far, including specially engineered photoresist or ink-jet printing, are either of poor yield, resolution limited, difficult to scale for mass production, overly expensive, or sacrificing some optical quality of the quantum dots. In our previous work, we presented a dry photolithographic lift-off method for pixelization of solution-processed materials and demonstrated its application in patterning perovskite quantum dot pixels, 10 µm in diameter, to construct a static micro-display. This report presents further development of this method and demonstrates high-resolution patterning (~1 µm diameter), full-scale processing on a 100 mm wafer, and multi-color integration of two different varieties of quantum dots. Perovskite and cadmium-selenide quantum dots were adopted for the experimentation, but the method can be applied to other types of solution-processed materials. We also demonstrate the viability of this method for constructing high-resolution micro-arrays of quantum dot color-convertors by fabricating patterned films directly on top of a blue gallium-nitride LED substrate. The green perovskite quantum dots used for fabrication were synthesized via the room-temperature ligand-assisted reprecipitation method developed by our research group, yielding a photoluminescent quantum yield of 93.6% and full-width half-maximum emission linewidth less than 20 nm. Our results demonstrate the viability of this method for use in scalable manufacturing of high-resolution micro-displays paving the way for improved optoelectronic applications.https://www.light-am.com/article/doi/10.37188/lam.2025.015quantum dotsphotolithographyhigh-resolution patterningwafer-scale processingmulti-color patterningcolor convertersmicro-leds
spellingShingle John Leo Velpugonda
Naresh Varnakavi
Matthew Yerich
Lih Y Lin
A universal high-resolution micro-patterning technique for solution-processed materials
Light: Advanced Manufacturing
quantum dots
photolithography
high-resolution patterning
wafer-scale processing
multi-color patterning
color converters
micro-leds
title A universal high-resolution micro-patterning technique for solution-processed materials
title_full A universal high-resolution micro-patterning technique for solution-processed materials
title_fullStr A universal high-resolution micro-patterning technique for solution-processed materials
title_full_unstemmed A universal high-resolution micro-patterning technique for solution-processed materials
title_short A universal high-resolution micro-patterning technique for solution-processed materials
title_sort universal high resolution micro patterning technique for solution processed materials
topic quantum dots
photolithography
high-resolution patterning
wafer-scale processing
multi-color patterning
color converters
micro-leds
url https://www.light-am.com/article/doi/10.37188/lam.2025.015
work_keys_str_mv AT johnleovelpugonda auniversalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT nareshvarnakavi auniversalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT matthewyerich auniversalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT lihylin auniversalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT johnleovelpugonda universalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT nareshvarnakavi universalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT matthewyerich universalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials
AT lihylin universalhighresolutionmicropatterningtechniqueforsolutionprocessedmaterials