Modified backscattering method of the nanometer self-supporting films and surface layers thickness measurements
Monitor-interrupter of accelerated ions beam is used in the backscattering standard scheme. The procedure of the thickness measurement requires getting of two spectra now. First spectrum is obtained for investigated target and second one for the target, which imitates a thick substrate. The monitor-...
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| Main Author: | |
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| Format: | Article |
| Language: | English |
| Published: |
Institute for Nuclear Research, National Academy of Sciences of Ukraine
2015-12-01
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| Series: | Ядерна фізика та енергетика |
| Subjects: | |
| Online Access: | http://jnpae.kinr.kiev.ua/16.4/html/16.4.0421.html |
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