Electronic Quality Enhancement of Multicrystalline Silicon via SiN<sub>x</sub> and H<sub>2</sub> Plasma Passivation Using Plasma-Enhanced Chemical Vapor Deposition for Photovoltaic Applications
This study explored advancements in photovoltaic technologies by enhancing the electronic quality of multicrystalline silicon (mc-Si) through silicon nitride (SiN<sub>x</sub>) and hydrogen (H<sub>2</sub>) plasma deposition via plasma-enhanced chemical vapor deposition (PECVD)...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-05-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/15/6/498 |
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