Nanofabrication of all-dielectric metasurfaces through pulsed thermal scanning probe lithography

Nanofabrication of all-dielectric metasurfaces through pulsed thermal scanning probe lithography

Abstract Many fields in science and industry rely on the advances of nanofabrication processes. However, well-established techniques, such as electron beam lithography, might pose restrictions on dielectric materials due to surface charging effects. We propose using pulsed thermal scanning probe lit...

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Bibliographic Details
Main Authors: Paloma E. S. Pellegrini, Luana De-Moraes, Freddy Jara Poma, Silvia Vaz Guerra Nista, Frederico H. Cioldin, Hugo Enrique Hernández-Figueroa, Stanislav Moshkalev
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Scientific Reports
Subjects:
Nanofabrication
Thermal scanning probe lithography
Charge dissipation-Free
Insulating substrates
All-dielectric metasurfaces
Online Access:https://doi.org/10.1038/s41598-025-07428-1
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https://doi.org/10.1038/s41598-025-07428-1

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