A Fault Diagnosis Method for Dry Vacuum Pump Bearing Based on Finite Element Simulation With Deep Transfer Learning
Dry vacuum pumps play a vital role in chip manufacturing, and failure of their core components, bearings, can lead to severe downtime and economic losses. Traditional fault diagnosis methods face challenges due to difficult data collection and inconsistent working conditions. In this paper, a dry va...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11058967/ |
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