Buried power rails and backside power distribution for nanometer-scale IC design
The technologies of buried power rails and backside power distribution networks are promising tools for reducing the size of nanoscale CMOS-based circuits. They provide significant improvement in many system-level parameters, for example, voltage drop and power losses are reduced by more than 2 time...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2025-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2025/06/epjconf_apitech-vii2025_03002.pdf |
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