A high-precision 1 × 15 infrared temperature measurement linear array based on thermopile sensors
Abstract In applications such as those in the semiconductor industry, precise temperature measurements with low power consumption are crucial. This article presents a novel noncontact temperature measurement method with low power consumption and high precision, and a thermopile sensor-based linear a...
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| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-07-01
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| Series: | Communications Engineering |
| Online Access: | https://doi.org/10.1038/s44172-025-00456-9 |
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