Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance
<p>This work presents the results obtained with potassium sodium niobate (KNN) biaxial non-resonant microelectromechanical systems (MEMS) mirrors manufactured on a 200 mm silicon substrate. These MEMS mirrors feature various reflector dimensions for the squared shape, ranging from 0.5 <span...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Copernicus Publications
2025-02-01
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| Series: | Journal of Sensors and Sensor Systems |
| Online Access: | https://jsss.copernicus.org/articles/14/27/2025/jsss-14-27-2025.pdf |
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