Setting the Emissivity of an Imaging Bolometer in the Surface Temperature Profile Measurement of SiC-Based MEMS Heaters
The proper usage of a bandwidth-limited imaging bolometer for the measurement of the lateral temperature profile of microstructures in Silicon-Carbide (SiC) is analyzed. The SiC spectral emissivity, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inl...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Metrology |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2673-8244/5/2/36 |
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