Setting the Emissivity of an Imaging Bolometer in the Surface Temperature Profile Measurement of SiC-Based MEMS Heaters

Setting the Emissivity of an Imaging Bolometer in the Surface Temperature Profile Measurement of SiC-Based MEMS Heaters

The proper usage of a bandwidth-limited imaging bolometer for the measurement of the lateral temperature profile of microstructures in Silicon-Carbide (SiC) is analyzed. The SiC spectral emissivity, <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inl...

Full description

Saved in:
Bibliographic Details
Main Authors: Reinoud Wolffenbuttel, David Bilby, Jaco Visser
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Series:Metrology
Subjects:
bolometer calibration
bolometer usage
Silicon-Carbide
SiC micro-heaters
SiC MEMS
SiC emissivity
Online Access:https://www.mdpi.com/2673-8244/5/2/36
Tags: Add Tag
No Tags, Be the first to tag this record!

Internet

https://www.mdpi.com/2673-8244/5/2/36

Similar Items