Effect of Precursor Purge Time on Plasma-Enhanced Atomic Layer Deposition-Prepared Ferroelectric Hf0.5Zr0.5O2 Phase and Performance

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Bibliographic Details
Main Authors:	Yong Kyu Choi, Kristina Holsgrove, Andrea Watson, Benjamin L. Aronson, Megan K. Lenox, Liron Shvilberg, Chuanzhen Zhou, Shelby S. Fields, Shihao Wang, Stephen J. McDonnell, Amit Kumar, Jon F. Ihlefeld
Format:	Article
Language:	English
Published:	American Chemical Society 2025-05-01
Series:	ACS Omega
Online Access:	https://doi.org/10.1021/acsomega.5c01112
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