Low-loss Si3N4 optical power splitter based on edge optimization design
With the development of information technology, the demand for smaller and more efficient optical devices is increasing. Utilizing complementary metal oxide semiconductor (CMOS) technology, Si3N4 optical power splitters were fabricated and tested. The results demonstrate that at a wavelength of 1 55...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Science Press (China Science Publishing & Media Ltd.)
2024-09-01
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| Series: | Shenzhen Daxue xuebao. Ligong ban |
| Subjects: | |
| Online Access: | https://journal.szu.edu.cn/en/#/digest?ArticleID=2675 |
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