Selective phase growth of ultra-smooth Ti2O3 and TiO2 thin films at low growth temperature controlled by the oxygen partial pressure
The selective phase growth of Ti-based oxide thin films on sapphire substrates is crucial in controlling the electronic properties, such as the insulator-to-metal transition (IMT). Thin films are generally prepared by pulsed laser deposition under high temperatures, but it is challenging to obtain a...
Saved in:
| Main Authors: | , , , , , , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-03-01
|
| Series: | Applied Surface Science Advances |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523925000157 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|