Nonlinear Modeling of a Piezoelectric Actuator-Driven High-Speed Atomic Force Microscope Scanner Using a Variant DenseNet-Type Neural Network
Piezoelectric actuators (PEAs) are extensively used for scanning and positioning in scanning probe microscopy (SPM) due to their high precision, simple construction, and fast response. However, there are significant challenges for instrument designers due to their nonlinear properties. Nonlinear pro...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
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| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/13/10/391 |
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