Electro-acoustic tranducers on the basis of thin PZT films
In the present work PZT-type thin films have been obtained by RF sputtering and electroacoustic transducers characterized by high sensitivity (γ), wide range of measured relative deformations (η) and high working frequencies (ω) were built. Polycrystalline ferroelectric thin films with the perovskit...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2014-09-01
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| Series: | Archives of Acoustics |
| Online Access: | https://acoustics.ippt.pan.pl/index.php/aa/article/view/1109 |
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