Monolithic Microlens VCSELs With High Beam Quality

Monolithic Microlens VCSELs With High Beam Quality

In this paper, we report on high beam quality vertical-cavity surface-emitting lasers (VCSELs) featuring a monolithically integrated aspherical microlens. This lens is fabricated by a one-step diffusion-limited wet etch process. VCSELs with microlenses with different curvature radius are designed, f...

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Bibliographic Details
Main Authors: Youwen Huang, Xing Zhang, Jianwei Zhang, Yiyang Xie, Werner Hofmann, Yongqiang Ning, Lijun Wang
Format: Article
Language:English
Published: IEEE 2017-01-01
Series:IEEE Photonics Journal
Subjects:
Semiconductor laser
VCSEL
micro-lens
high beam quality
wet-etching.
Online Access:https://ieeexplore.ieee.org/document/7959035/
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https://ieeexplore.ieee.org/document/7959035/

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