Critical Parameters and Influence on Dynamic Behaviours of Nonlinear Electrostatic Force in a Micromechanical Vibrating Gyroscope

The electrostatic force nonlinearity caused by fringe effects of the microscale comb will affect the dynamic performance of the micromechanical vibrating gyroscopes (MVGs). In order to reveal the influence mechanism, a class of four-degree-of-freedom (4-DOF) electrostatically driven MVG is considere...

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Bibliographic Details
Main Authors: Shuying Hao, Yulun Zhu, Yuhao Song, Qichang Zhang, Jingjing Feng, Kunpeng Zhang
Format: Article
Language:English
Published: Wiley 2020-01-01
Series:Shock and Vibration
Online Access:http://dx.doi.org/10.1155/2020/8880124
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