Matrix technology of measurements. Path to nanometers
The new technology for measuring linear and angular coordinates uses an optical pattern with a very large number of elements (tens/hundreds of thousands). A simultaneous measurement of the position of all elements of the pattern image using a digital camera increases the accuracy of measuring the po...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Samara National Research University
2025-02-01
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| Series: | Компьютерная оптика |
| Subjects: | |
| Online Access: | https://computeroptics.ru/eng/KO/Annot/KO49-1/490109e.html |
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